Products
Refurbishment
a) Kashiyama Pump
- Incoming inspection (Test and visual inspection of parts after disassembly).
- Standard parts overhaul.
- Replace and repair of any faulty part.
- Outgoing inspection and test according to Kashiyama test specification.
- Standard parts overhaul.
- Replace and repair of any faulty part.
- Outgoing inspection and test according to Kashiyama test specification.
b) Cryopump - OB-IS8F, OB-IS250FE, OB-IS320FE, OB-IS320FX.
- External check on condition and modules
- Perform diagnostic and communication inspection.
- Dismantle, cleaning and replacement of parts (Charcoal, bearing kit, seal kit, etc.).
- Checking of pump speed, stage 1 & 2 cold head, Regen and heating process.
- Perform diagnostic and communication inspection.
- Dismantle, cleaning and replacement of parts (Charcoal, bearing kit, seal kit, etc.).
- Checking of pump speed, stage 1 & 2 cold head, Regen and heating process.
c) ESC Heater (Level 1 – Level 4)
- Visual inspection of ALN Plate
- Checking of dimension, electrical, chucking force and voltage, adhesive and helium leak.
- Removal of metal residue, bellow change, roughness and flatness control, cleaning and baking, dimple regeneration.
- Out-going inspection: Wafer chucking force, ultrasonic and temperature.
- Checking of dimension, electrical, chucking force and voltage, adhesive and helium leak.
- Removal of metal residue, bellow change, roughness and flatness control, cleaning and baking, dimple regeneration.
- Out-going inspection: Wafer chucking force, ultrasonic and temperature.
Repair
Shutter Sensor Box
Bellows
MKS Baratheon Gauge
VAT Gate Valve
ISSAC Signal Tower
MKS I/O Cards
Others - Electronic parts
- MKS I/O Cards
- Controller (Flow, Temperature, power, ETC)
- Bellows
- Shutter Sensor Box
- MKS Baratheon Gauge
- VAT Gate Valve
- Pedestal Heater
- ISSAC Signal Tower
- UPS
- Controller (Flow, Temperature, power, ETC)
- Bellows
- Shutter Sensor Box
- MKS Baratheon Gauge
- VAT Gate Valve
- Pedestal Heater
- ISSAC Signal Tower
- UPS
Recycling
SYM3 Liners
SYM3 Lid (Recycling and coating CIP)
Recycling for other SYM3 Parts
Membrane (Silicon Rubber)
New Parts
a) ALD Susceptor
b) Shower Head & Insert
c) Quad A & Quad X
d) Spacer
Remarks:
Shower Head
a) ALD Susceptor
b) Shower Head & Insert
PEZ Ring
Description: PEZ Ring
Material: Bulk Y2O3 / AL2O3 with Coating
Application: Etch
Equipment: LAM Coronus
Ceramic Parts (ETCH - LAM)
Silicon Parts
a) Description: Si RK Parts
Application: Etch
Equipment: TEL RK Series
b) Description: C-Shroud Ring
Application: Etch
Equipment: LAM
c) Description: Silicon Boat
Application: Diffusion
Size: 150mm, 200mm, 300mm and >300mm
